Nghiên cứu áp dụng phương pháp hạt nhân trong phân tích vật liệu TiO2/SiO2 sử dụng chùm ion

Chuyên ngành

Vật lý nguyên tử

Người đăng

Ẩn danh

Thể loại

Luận án tiến sĩ

2023

113
0
0

Phí lưu trữ

30 Point

Mục lục chi tiết

TÓM TẮT

ABSTRACT

ACKNOWLEDGMENTS

TABLE OF CONTENTS

LIST OF ABBREVIATIONS

LIST OF TABLES

LIST OF FIGURES

1. CHAPTER 1: THEORETICAL BACKGROUND

1.1. Concept of ion beam mixing

1.2. Atomic collisions in solids

1.3. Kinematic of elastic collisions

1.4. Differential cross-section

1.5. Energy loss process

1.6. Low-energy ion modification of solids and IBM process

2. CHAPTER 2: THE EXPERIMENTAL METHODS

2.1. Rutherford Backscattering Spectrometry (RBS) – an IBA method

2.2. Ellipsometry Spectroscopy (ES) method

2.3. Interaction of Light and Materials

2.4. X-ray Photoelectron Spectroscopy (XPS) method

3. CHAPTER 3: RESULTS AND DISCUSSION

3.1. Influence of ion energy and mass on mixing of TiO2/SiO2 structures with different thickness

3.2. Characterization of samples and the mixing process

3.3. Dependence of mixing degree on energy of incident ions

3.4. Dependence of mixing degree on mass of the incident ions

3.5. Study on mixing of TiO2/SiO2 systems with different thicknesses

3.6. Influence of the ion energy on chemical composition of TiO2 near surface layers, and its effect to mixing of TiO2/SiO2 systems

3.7. The optical property of the TiO2/SiO2 mixed layers obtained by Spectroscopy Ellipsometry

3.8. Calculation thickness and components of the TiO2/SiO2 mixed layers

3.9. Variation of refractive index (n) and extinction coefficient (k) with ion energy

3.10. Variation of optical energy gap (Eg) of TiO2/SiO2 mixed area with ion energy

CONCLUSIONS AND FUTURE SCOPE

Luận án nghiên cứu áp dụng một số phương pháp hạt nhân nguyên tử trong phân tích vật liệu tio2sio2 sử dụng chùm ion từ máy gia tốc